Needle in a haystack: Efficiently finding atomically defined quantum dots for electrostatic force microscopy

The ongoing development of single electron, nano-, and atomic scale semiconductor devices would greatly benefit from a characterization tool capable of detecting single electron charging events with high spatial resolution at low temperatures. In this work, we introduce a novel Atomic Force Microscope (AFM) instrument capable of measuring critical device dimensions, surface roughness, electrical surface potential, and ultimately the energy levels of quantum dots and single electron transistors in ultra miniaturized semiconductor devices. The characterization of nanofabricated devices with this type of instrument presents a challenge: finding the device. We, therefore, also present a process to efficiently find a nanometer sized quantum dot buried in a 10 × 10 mm2 silicon sample using a combination of optical positioning, capacitive sensors, and AFM topography in a vacuum.

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Publication Details

Journal
Review of Scientific Instruments
Published
2024-08-01
DOI
https://doi.org/10.1063/5.0208571
Citations
1
Primary Topic
Force Microscopy Techniques and Applications
Type
article
Field-Weighted Citation Impact
0.34

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article

Needle in a haystack: Efficiently finding atomically defined quantum dots for electrostatic force microscopy

Neil J. Curson, Taylor J. Z. Stock, Yoichi Miyahara, Peter Grütter et al.
1 citations
Review of Scientific Instruments
Force Microscopy Techniques and Applications
0.34
article

Needle in a haystack: Efficiently finding atomically defined quantum dots for electrostatic force microscopy

Neil J. Curson, Taylor J. Z. Stock, Yoichi Miyahara, Peter Grütter, Logan Fairgrieve‐Park, José Bustamante, Kieran Spruce, P. See
article en
1 citations

Abstract

The ongoing development of single electron, nano-, and atomic scale semiconductor devices would greatly benefit from a characterization tool capable of detecting single electron charging events with high spatial resolution at low temperatures. In this work, we introduce a novel Atomic Force Microscope (AFM) instrument capable of measuring critical device dimensions, surface roughness, electrical surface potential, and ultimately the energy levels of quantum dots and single electron transistors in ultra miniaturized semiconductor devices. The characterization of nanofabricated devices with this type of instrument presents a challenge: finding the device. We, therefore, also present a process to efficiently find a nanometer sized quantum dot buried in a 10 × 10 mm2 silicon sample using a combination of optical positioning, capacitive sensors, and AFM topography in a vacuum.

Review of Scientific InstrumentsVol. 95(8)
National Physical Laboratory (GB), Texas State University (US), London Centre for Nanotechnology (GB), Faculty of 1000 (United Kingdom) (GB), University College London (GB), McGill University (CA), Universidad San Francisco de Quito (EC)
National Research Council, Engineering and Physical Sciences Research Council, Fonds de recherche du Québec – Nature et technologies
Affordable and clean energy
Openalex Percentile: Top 41%
Force Microscopy Techniques and Applications
0.34
DOISourceOpenAlex
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Needle in a haystack: Efficiently finding atomically defined quantum dots for electrostatic force microscopy — Neil J. Curson, Taylor J. Z. Stock, et al. · Review of Scientific Instruments (2024) | TGRS Research Map | TGRS