Investigations of the Laser Ablation Mechanism of PMMA Microchannels Using Single-Pass and Multi-Pass Laser Scans

CO₂ laser machining is a cost effective and time saving solution for fabricating microchannels on polymethylmethacrylate (PMMA). Due to the lack of research on the incubation effect and ablation behavior of PMMA under high-power laser irradiation, predictions of the microchannel profile are limited. In this study, the ablation process and mechanism of a continuous CO₂ laser machining process on microchannel production in PMMA in single-pass and multi-pass laser scan modes are investigated. It is found that a higher laser energy density of a single pass causes a lower ablation threshold. The ablated surface can be divided into three regions: the ablation zone, the incubation zone, and the virgin zone. The PMMA ablation process is mainly attributed to the thermal decomposition reactions and the splashing of molten polymer. The depth, width, aspect ratio, volume ablation rate, and mass ablation rate of the channel increase as the laser scanning speed decreases and the number of laser scans increases. The differences in ablation results obtained under the same total laser energy density using different scan modes are attributed to the incubation effect, which is caused by the thermal deposition of laser energy in the polymer. Finally, an optimized simulation model that is used to solve the problem of a channel width greater than spot diameter is proposed. The error percentage between the experimental and simulation results varies from 0.44% to 5.9%.