Kinetic inductance compact resonator with NbTiN micronwires

Nonlinear resonators of superconducting thin-film kinetic inductance have attracted considerable research interest in the fields of detectors, qubits, parametric amplifiers, and more. By tuning the deposition parameters, niobium titanium nitride (NbTiN) films (∼12 nm in thickness) present high resistivity(∼2000 μΩ cm) and large sheet kinetic inductance (∼0.7 nH/□). We designed resonators with NbTiN micronwire as the inductor and aluminum as the capacitor, which result in a high internal quality factor and a Kerr nonlinearity of a few hertz. The radio frequency response of the resonators demonstrates nonlinear behavior similar to that of the cubic Duffing oscillator, including frequency shift and hysteresis region. The kinetic inductance resonator is a promising candidate for high saturation power parametric amplifiers.