Research on influence of random vibration on closed-loop drive control of MEMS gyroscope

Abstract In response to the unclear impact of random vibration on the drive mode of MEMS gyroscopes, this paper analyzes the effects of vibration on the use of proportional control and PID control in self-excited oscillation close-loop drive through theoretical derivation and experimental comparison. By deducing the principles of synovial comb and self-excited oscillation closed-loop drive, the performance degradation of closed-loop drive control caused by vibration is analyzed theoretically. Data was collected by PCI-4461. The result shows that the peak-peak value of the drive mode output signal of the PID control loop under vibration is 43% of that of the proportional control loop. Compared with a proportional control loop, a PID control loop can better suppress the impact of random vibration.