Design of automatic and integrated calibration device for dynamic characteristics of eddy-current sensor

Abstract To realize the dynamic calibration of eddy current sensor with high precision and high efficiency in a wide frequency range, a set of standard shaking table was designed as the actuator for the dynamic calibration of eddy current sensor, and the modal analysis and harmonic response analysis of the vibration disk were completed. At the same time, the control system was designed based on FPGA. The design of control system includes the design of signal generator with adjustable frequency and amplitude, data collector and communication module. Finally, the dynamic test and analysis of the eddy current sensor dynamic calibration disk was completed and the calibration accuracy of the standard vibration table is verified by comparative method. The deviation is less than 3% at the whole frequency band from 10-500HZ, which meets the design requirements.