Electromagnetic wave scattering simulation from precision grinding SiC surface under the influence of suspended micro-particles

In a precision machining environment, suspended particles in the air have a non-negligible effect on visual roughness measurement results. To address this issue, this paper analyzes the influence of particles on the visual roughness measurement from theoretical derivation and numerical simulation, respectively. Firstly, based on the Lambert-Beer and the light scattering principles, the propagation equation of incident light under the joint action of suspended particles and rough surfaces is derived. Then, a numerical simulation model is designed, and the theoretical equations are verified by simulation experiments. The influence of particle material, particle size (D), particle concentration (N), light wavelength (λ), and SiC surface roughness (Ra) on the average electric field magnitude of the energy-acquisition boundary are analysed based on the simulation experiments. The theoretical derivation shows that the average electric field magnitude of the energy-acquisition boundary is mainly influenced by particle state and rough surface state. The simulation experiment results show that both the particle parameters and the rough surface parameters are consistent with the theoretical derivation. As Ra increases, the effect of N on the measurement results decreases. The results reveal the influence mechanism of suspended particles on the visual roughness measurement results and provide a basis for improving visual roughness measurement accuracy.