Research on 3D fabrication technology of monocrystalline silicon microlens array femtosecond laser

When the traditional processing method is used to process hard and brittle monocrystalline silicon, it will encounter a variety of problems, so it is necessary to use laser processing method. Laser processing is a new processing method, and there are few relevant studies on laser processing silicon convex microlens array, and no polishing. Therefore, the morphologies of silicon microlens arrays fabricated by femtosecond laser are studied in this paper. The results show that when the fixed green light is 100KHz, the power is about 36W, and the speed is 1500mm/s, the 3D dynamic processing effect of femtosecond laser is better. The morphology compensation research is carried out, and the surface roughness is greatly improved by using mirror jet polishing.