Application of anlogic infotech EG4D20 FPGA in wafer and chip defect observation

This paper explores the feasibility and challenge of applying FPGA technology, specifically Anlogic Infotech EG4D20 FPGA, in wafer and chip defect detection. A preliminary FPGA-based chip defect observation system is constructed, enabling real-time monitoring of surface features on silicon wafers. This system rapidly displays existing defects on the silicon surface, meets the real-time image acquisition requirements of chip observation systems, and exhibits high reliability. Based on this research direction, a design scheme is proposed for an FPGA chip defect detection system equipped with the Yolov5 algorithm model. This scheme provides a new research approach for chip defect detection technology and highlights the immense potential of FPGA in this field.