Improving the yield of CCAT MKID arrays with post-measurement lithographic corrections

While large arrays of microwave kinetic inductance detectors (MKIDs) have been demonstrated with photon noise limited performance, imperfect frequency placement due to fabrication non-uniformity has led to resonators that collide with their frequency neighbors. Though physically yielded, the excess cross talk means that they are unusable for science applications. This would lead to reduced performance when placed on telescopes such as the CCATs FYST. However, we can use the LED trimming method developed at NIST to identify the non-uniformities, the resonator location to frequency correspondence, and then re-etch the resonators to correct them to an optimal position. This process has been demonstrated on a CCAT 280 GHz MKID array. We will show the results of the trimming of 3456 resonators on the array, and how the yield would be improved while maintaining the optical performance of the pixels. This demonstrates a path towards ideal wafer-scale MKID arrays.