Research on the geometric position error characteristics of the nanometer time-grating displacement sensor

In order to create a kind of wide-ranged nano-grade accurate displacement measurement with low manufacturing costs, strong anti-interference capabilities and stable performance, the nanometer time-grating sensor based on AC electric field coupling has been researched. According to the working principle of the sensor, the effects of moving ruler and fixed ruler in the condition of various geometric position of nanometer on the accuracy of grating sensor has been researched. Firstly, through theoretical model analysis of the influence of geometric location to the sensor precision. Then, utilizing the air bearing linear guide of ultra-precision and high-precision six-dimension experiment mechanism to build an experiment platform and nano-grade sensors for precise quantitative experiments. The sensor geometry location parameter and error are obtained by using the theoretical model analysis combined with experiment. The experiments show that the nano-grade sensor range can measure 200mm,the accuracy can reach ±400 nm in geometric location deviation.