Integrated error modeling and evaluation of the effect for the Wolter-I grazing incidence focusing mirror imaging quality

The imaging quality determines the performance of the Wolter-I grazing incidence focusing mirror. When the design parameters are specified, the factors affecting the imaging quality are mainly machining and assembly errors; finding the error sources and evaluating the main errors are critical fundamental issues to achieve process optimization and control and improve imaging quality. This paper constructs a model of surface distribution error based on Nurbs surface reconstruction by non-contact measurement. It proposes an integrated error modeling method based on the surface distribution error model, taking into account the typical assembly errors such as decenter error, defocus error, and tilt error formed during the assembly process. First, the theoretical modeling and analysis of imaging quality based on ideal surface shape are carried out, and the sensitivity analysis of each error is carried out by using the Monte Carlo ray tracing method; then, an integrated optical simulation model containing assembly errors based on the surface distribution error is established, and the imaging quality of the focused spot is evaluated; finally, the experimental validation is carried out. The results of the experiment and the integrated optical simulation model show overall consistency, where the decenter error and defocus error have less influence, and the tilt error has the greatest impact, with the 10 ′ tilt error causing a decrease in the angular resolution of the focused spot of about 50″. The method can provide effective modeling and computational approaches to support the optimization of the precision assembly process and quality control of the Wolter-I grazing incidence focusing mirror.