Ion Beam Scanning System for EG-5 Accelerator
A proton beam scanning system for silicon sample irradiation has been developed in the frame of the EG-5 accelerator upgrade project and joint work with Micron JSC and Angstrom JSC located in Zelenograd. Together with employees of SPE ESTO JSC (Zelenograd), an automated system has been developed, produced, and tested on the basis of the EG-5 electrostatic accelerator to carry out the technological operation of ion implantation of silicon wafers for the production of power electronics. The developed system is an experimental platform that allows varying the distribution of the sample surface coating during scanning with accelerated particles.
Authors
- Victor Alexandrov (ORCID: https://orcid.org/0000-0001-9224-7286)
- Luis Miguel Ledo Pereda (ORCID: https://orcid.org/0000-0002-2818-2446)
- V. S. Rikhvitsky
- I.A. Chepurchenko
- R. Sh. Isaev
- В. Н. Семенов
- A. S. Doroshkevich
- Aleksandr Likhachev (ORCID: https://orcid.org/0000-0001-6684-4327)
Institutions
- Joint Institute for Nuclear Research (RU)
- Centro de Aplicaciones Tecnológicas y Desarrollo Nuclear (CU)
Publication Details
- Journal
- Physics of Particles and Nuclei Letters
- Published
- 2024-08-01
- DOI
- https://doi.org/10.1134/s1547477124701061
- Citations
- 5
- Primary Topic
- Nuclear Physics and Applications
- Type
- article
- Field-Weighted Citation Impact
- 3.04