A Low-Power MEMS Micro-Hotplate for Ethanol Sensing

Abstract The MEMS-based micro-hotplate was widely used for gas sensing and has demonstrated a responsive range of 1-200 ppm for ethanol detection. In this study, a low-power micro-heater was designed and simulated using COMSOL Multiphysics. The hybrid 1D and 2D ZnO nanoparticles were utilized as the sensing layers for ethanol sensing. The sensing devices were fabricated and characterized. The electrical performance of the gas sensors was consistent with the simulation results, demonstrating low power consumption and high reliability. In gas sensing characterizations, the sensors exhibited high sensitivity, excellent repeatability, short response/recovery time, strong anti-interference capability, and high reliability.