The cell elastic modulus sensing based on surface acoustic wave devices

Abstract Elastic modulus is an important parameter to reflect the status of the cell. In this work, the elastic modulus of liquid and cancer cell were studied based on the delay line type surface acoustic wave (SAW) device. Firstly, the finite element method (FEM) was used to analyse and design the sensor, a cavity was etched on the propagation path. After the acoustic wave transmit through the cavity, the transmission parameter was disturbed by the material in the cavity. The phase shift of the S 21 parameter of the SAW sensor was used to detect the elastic modulus of liquid or cell in the cavity.