Surface Analysis and Vacuum Performance of BeCu Alloy Materials

BeCu material has the characteristics of high thermal conductivity and low thermal emissivity, which can reduce temperature rise. Furthermore, BeCu material is able to reduce the outgassing with the special heat treatment. These characteristics make it easier to get a high vacuum. The surface structure of BeCu material was confirmed by X-ray photoelectron spectroscopy (XPS) analysis, the absorbed gas in the material was measured by thermal desorption spectroscopy (TDS), and the outgassing from the material were measured by a build-up test. These test results confirmed that BeCu material has excellent vacuum properties.

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Publication Details

Journal
Vacuum and Surface Science
Published
2024-08-09
DOI
https://doi.org/10.1380/vss.67.393
Citations
1
Primary Topic
Copper Interconnects and Reliability
Type
article
Field-Weighted Citation Impact
0.12
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article

Surface Analysis and Vacuum Performance of BeCu Alloy Materials

Toru Yanagibashi, M. Kuramochi, J. Kamiya, Kaoru Wada et al.
1 citations
Vacuum and Surface Science
Copper Interconnects and Reliability
0.12
article

Surface Analysis and Vacuum Performance of BeCu Alloy Materials

Toru Yanagibashi, M. Kuramochi, J. Kamiya, Kaoru Wada, T. Shiga
article en
1 citations

Abstract

BeCu material has the characteristics of high thermal conductivity and low thermal emissivity, which can reduce temperature rise. Furthermore, BeCu material is able to reduce the outgassing with the special heat treatment. These characteristics make it easier to get a high vacuum. The surface structure of BeCu material was confirmed by X-ray photoelectron spectroscopy (XPS) analysis, the absorbed gas in the material was measured by thermal desorption spectroscopy (TDS), and the outgassing from the material were measured by a build-up test. These test results confirmed that BeCu material has excellent vacuum properties.

Vacuum and Surface ScienceVol. 67(8)
Tokyo Electron (Japan) (JP), Japan Atomic Energy Agency (JP), Japan Electronics College (JP)
Openalex Percentile: Top 68%
Copper Interconnects and Reliability
0.12
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Surface Analysis and Vacuum Performance of BeCu Alloy Materials — Toru Yanagibashi, M. Kuramochi, et al. · Vacuum and Surface Science (2024) | TGRS Research Map | TGRS