CMOS-compatible reconstructive spectrometers with self-referencing integrated Fabry–Perot resonators

Miniaturized reconstructive spectrometers play a pivotal role in on-chip and portable devices, offering high-resolution spectral measurement through precalibrated spectral responses and AI-driven reconstruction. However, two key challenges persist for practical applications: artificial intervention in algorithm parameters and compatibility with complementary metal-oxide-semiconductor (CMOS) manufacturing. We present a cutting-edge miniaturized reconstructive spectrometer that incorporates a self-adaptive algorithm referenced with Fabry-Perot resonators, delivering precise spectral tests across the visible range. The spectrometers are fabricated with CMOS technology at the wafer scale, achieving a resolution of ~2.5 nm, an average wavelength deviation of ~0.27 nm, and a resolution-to-bandwidth ratio of ~0.46%. Our approach provides a path toward versatile and robust reconstructive miniaturized spectrometers and facilitates their commercialization.

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Publication Details

Journal
Proceedings of the National Academy of Sciences
Published
2024-08-08
DOI
https://doi.org/10.1073/pnas.2403950121
Citations
13
Primary Topic
Mechanical and Optical Resonators
Type
article
Field-Weighted Citation Impact
4.39

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article

CMOS-compatible reconstructive spectrometers with self-referencing integrated Fabry–Perot resonators

Bingxin Chen, Junhan Liu, Binmin Wu, Jizhai Cui et al.
13 citations
Proceedings of the National Academy of Sciences
Mechanical and Optical Resonators
4.39
article

CMOS-compatible reconstructive spectrometers with self-referencing integrated Fabry–Perot resonators

Bingxin Chen, Junhan Liu, Binmin Wu, Jizhai Cui, Zengfeng Di, Guobang Jiang, Chunyu You, Xiangzhong Chen, Yongfeng Mei, Enming Song, Ningge Huang, Gaoshan Huang, Yue Wu, Zhenghua An, Yang Wang, Yuhang Hu, Xing Li, Ziyu Zhang, Jiayuan Huang, Peng Zhou
article en
13 citations

Abstract

Miniaturized reconstructive spectrometers play a pivotal role in on-chip and portable devices, offering high-resolution spectral measurement through precalibrated spectral responses and AI-driven reconstruction. However, two key challenges persist for practical applications: artificial intervention in algorithm parameters and compatibility with complementary metal-oxide-semiconductor (CMOS) manufacturing. We present a cutting-edge miniaturized reconstructive spectrometer that incorporates a self-adaptive algorithm referenced with Fabry-Perot resonators, delivering precise spectral tests across the visible range. The spectrometers are fabricated with CMOS technology at the wafer scale, achieving a resolution of ~2.5 nm, an average wavelength deviation of ~0.27 nm, and a resolution-to-bandwidth ratio of ~0.46%. Our approach provides a path toward versatile and robust reconstructive miniaturized spectrometers and facilitates their commercialization.

Proceedings of the National Academy of SciencesVol. 121(33)
Chinese Academy of Sciences (CN), Fudan University (CN), Shanghai Institute of Microsystem and Information Technology (CN), Yiwu Science and Technology Research Institute (CN), State Key Laboratory of Surface Physics
National Natural Science Foundation of China, Ministry of Science and Technology of the People's Republic of China, Science and Technology Commission of Shanghai Municipality
Industry, innovation and infrastructure
Openalex Percentile: Top 5%
Mechanical and Optical Resonators
4.39
DOIOpen Access PDFOpenAlex
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