A 128 × 128 SPAD LiDAR sensor with column-parallel 25 ps resolution TA-ADCs

Abstract This paper presents a design of single photon avalanche diode (SPAD) light detection and ranging (LiDAR) sensor with 128 × 128 pixels and 128 column-parallel time-to-analog-merged-analog-to-digital converts (TA-ADCs). Unlike the conventional TAC-based SPAD LiDAR sensor, in which the TAC and ADC are separately implemented, we propose to merge the TAC and ADC by sharing their capacitors, thus avoiding the analog readout noise of TAC’s output buffer, improving the conversion rate, and reducing chip area. The reverse start-stop logic is employed to reduce the power of the TA-ADC. Fabricated in a 180 nm CMOS process, our prototype sensor exhibits a timing resolution of 25 ps, a DNL of +0.30/−0.77 LSB, an INL of +1.41/−2.20 LSB, and a total power consumption of 190 mW. A flash LiDAR system based on this sensor demonstrates the function of 2D/3D imaging with 128 × 128 resolution, 25 kHz inter-frame rate, and sub-centimeter ranging precision.