ON POSSIBILITY OF DRAIN OF DOPANT IN A MULTILAYER STRUCTURE TO INCREASE HOMOGENEITY OF DISTRIBUTION OF THE DOPANT’S CONCENTRATION

In this paper, we introduce an approach to increase homogeneity of distribution of implanted dopant in enriched area due to organization of drains. Also we introduce a model and analytical approach for analysis of the considered technological process in multilayer structures with account variation in time parameters of the process and nonlinearity of mass transport. Received: May 21, 2024;Accepted: June 10, 2024

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Publication Details

Journal
International Journal of Materials Engineering and Technology
Published
2024-08-05
DOI
https://doi.org/10.17654/0975044424005
Primary Topic
Electric Power Systems and Control
Type
article
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article

ON POSSIBILITY OF DRAIN OF DOPANT IN A MULTILAYER STRUCTURE TO INCREASE HOMOGENEITY OF DISTRIBUTION OF THE DOPANT’S CONCENTRATION

E. L. Pankratov
International Journal of Materials Engineering and Technology
Electric Power Systems and Control
article

ON POSSIBILITY OF DRAIN OF DOPANT IN A MULTILAYER STRUCTURE TO INCREASE HOMOGENEITY OF DISTRIBUTION OF THE DOPANT’S CONCENTRATION

E. L. Pankratov
article en

Abstract

In this paper, we introduce an approach to increase homogeneity of distribution of implanted dopant in enriched area due to organization of drains. Also we introduce a model and analytical approach for analysis of the considered technological process in multilayer structures with account variation in time parameters of the process and nonlinearity of mass transport. Received: May 21, 2024;Accepted: June 10, 2024

International Journal of Materials Engineering and TechnologyVol. 23(1)
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Electric Power Systems and Control
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ON POSSIBILITY OF DRAIN OF DOPANT IN A MULTILAYER STRUCTURE TO INCREASE HOMOGENEITY OF DISTRIBUTION OF THE DOPANT’S CONCENTRATION — E. L. Pankratov · International Journal of Materials Engineering and Technology (2024) | TGRS Research Map | TGRS