Ferroelectric AlBN films by molecular beam epitaxy
We report the properties of molecular beam epitaxy deposited AlBN thin films on a recently developed epitaxial nitride metal electrode, Nb2N. While a control AlN thin film exhibits standard capacitive behavior, distinct ferroelectric switching is observed in the AlBN films with increasing Boron mole fraction. The measured remnant polarization Pr∼15μC/cm2 and coercive field Ec∼ 1.45 MV/cm in these films are smaller than those recently reported on films deposited by sputtering, due to incomplete wake-up, limited by current leakage. Because AlBN preserves the ultrawide energy bandgap of AlN compared to other nitride hi-K dielectrics and ferroelectrics, and it can be epitaxially integrated with GaN and AlN semiconductors, its development will enable several opportunities for unique electronic, photonic, and memory devices.
Authors
- Takuya Maeda (ORCID: https://orcid.org/0000-0002-2736-5611)
- Kazuki Nomoto
- Debdeep Jena (ORCID: https://orcid.org/0000-0002-4076-4625)
- Eungkyun Kim (ORCID: https://orcid.org/0000-0001-9266-1524)
- Shubham Jadhav (ORCID: https://orcid.org/0000-0003-3114-4544)
- Madhav Ramesh (ORCID: https://orcid.org/0000-0003-0396-561X)
- Amit Lal (ORCID: https://orcid.org/0000-0002-1805-9831)
- Thai‐Son Nguyen (ORCID: https://orcid.org/0000-0002-1193-834X)
- Joongwon Lee (ORCID: https://orcid.org/0000-0002-7097-1203)
- Farhan Rana (ORCID: https://orcid.org/0000-0002-7870-9891)
- Chandrashekhar Savant (ORCID: https://orcid.org/0000-0001-7174-1103)
- Huili Grace Xing (ORCID: https://orcid.org/0000-0002-2709-3839)
- Ved Gund (ORCID: https://orcid.org/0000-0002-6509-1025)
- Joseph Casamento (ORCID: https://orcid.org/0000-0002-8621-1145)
- Yu‐Hsin Chen (ORCID: https://orcid.org/0009-0003-1408-9210)
Institutions
- Cornell University (US)
Publication Details
- Journal
- Applied Physics Letters
- Published
- 2024-08-12
- DOI
- https://doi.org/10.1063/5.0181217
- Citations
- 14
- Primary Topic
- Acoustic Wave Resonator Technologies
- Type
- article
- Field-Weighted Citation Impact
- 2.58
Funders
- National Science Foundation
- U.S. Department of Energy
- Pennsylvania State University
- Office of Science
- Cornell Center for Materials Research
- Materials Research Science and Engineering Center, Harvard University
- Division of Materials Research
- Basic Energy Sciences
- Army Research Office
- Energy Frontier Research Centers