Interplay of symmetry-conserved tunneling, interfacial oxidation and perpendicular magnetic anisotropy in CoFeB/MgO-based junctions

Abstract The interfacial oxidation level and thermodynamic properties of the MgO-based perpendicular magnetic tunneling junctions are investigated. The symmetry-conserved tunneling effect depends sensitively on the MgO adatom energy during the RF sputtering, as well as the thermal stability of the structure during the post-growth thermal annealing. Two different failure modes of the magnetoresistance are highlighted, involving with the decay of perpendicular magnetic anisotropy and destruction of coherent tunneling channels, respectively. Through the careful control of interfacial oxidation level and proper selection of the heavy metal layers, both perpendicular magnetic anisotropy and tunneling magnetoresistance of the junctions can be increased.