Design and Simulation of an Electrostatically-Driven MEMS Micro- Mixer

Bio MEMS (Biology Micro electro mechanical Systems) focus on some micro-fabricated devices including electrical and mechanical parts to study the biological system.Especially some micro-liquid handling devices like micro-pumps, active and passive micro-mixers that can make two or more micro-fluids mixing completely, with the chaotic advection.This kind of rapid mixing is very important in the biochemistry analysis, drug delivery and sequencing or synthesis of nucleic acids.Besides, some biological processes like cell activation, enzyme reactions and protein folding also require mixing of reactants for initiation, electrophoresis activation.Turbulence and inter-diffusion of them play crucial role in the process of mixing of different fluids.In this paper, the design of a new kind of electromechanical active micro-mixer, which includes two inlets and one outlet under the electrostatic driven voltage is presented.Two different fluids will enter the micro-mixer and shows different colors separately blue and red.Choosing the ANSYS for the simulation of the fluids running in the micro-mixers, we can see nearly 100% fluids that have been mixed.ANSYS is used to show the effectiveness of the micro-mixer.